Title:
Imaging optics
Document Type and Number:
Japanese Patent JP5938043
Kind Code:
B2
Abstract:
An imaging optical system (9) for a projection exposure system has at least one anamorphically imaging optical element (M1 to M6). This allows a complete illumination of an image field in a first direction with a large object-side numerical aperture in this direction, without the extent of the reticle to be imaged having to be enlarged and without a reduction in the throughput of the projection exposure system occurring.
Inventors:
Manhans Jürgen
Application Number:
JP2013528634A
Publication Date:
June 22, 2016
Filing Date:
September 13, 2011
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B17/06; G03F7/20; H01L21/027
Domestic Patent References:
| JP2009508150A | ||||
| JP2008176326A | ||||
| JP200248977A | ||||
| JP1010428A |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Nobuyuki Taniguchi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Nobuyuki Taniguchi
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