Title:
衝突イオン化源
Document Type and Number:
Japanese Patent JP7117107
Kind Code:
B2
Abstract:
A collision ionization source is disclosed herein. An example source includes an ionization region arranged to receive a gas and a charged particle beam, the charged particle beam to ionize at least some of the gas, and a supply duct arranged to provide the gas to the ionization region, the supply duct having a non-uniform height decreasing from an input orifice to an output orifice, the output orifice arranged adjacent to the ionization region.
Inventors:
Gregory A. Shwind
Aurelian Filippe Jean McClue Botsman
Sean Kellogg
Leon Van Cowen
Luigi Mele
Aurelian Filippe Jean McClue Botsman
Sean Kellogg
Leon Van Cowen
Luigi Mele
Application Number:
JP2018000894A
Publication Date:
August 12, 2022
Filing Date:
January 06, 2018
Export Citation:
Assignee:
FEI COMPANY
International Classes:
H01J27/20; H01J37/08; H01J37/317
Domestic Patent References:
| JP2015525951A | ||||
| JP2007227381A | ||||
| JP2010153278A | ||||
| JP2007234583A | ||||
| JP2009277434A |
Foreign References:
| US20080067408 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Masahiko Amagai
Tadahiko Ito
Shinsuke Onuki
Masahiko Amagai