Title:
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2019096697
Kind Code:
A
Abstract:
To provide an advantageous technique that suppresses generation of defective products due to particles in a patterning device.SOLUTION: A patterning device forms a pattern on a substrate by using an original plate. The patterning device includes a substrate holding unit that holds the substrate, an original plate driving unit that holds and drives the original plate, a collection surface that is disposed around the original plate driving unit and collects particles, a detector that detects the state of the collection surface, and a control unit that executes error processing according to a change in the result detected by the detector.SELECTED DRAWING: Figure 1
Inventors:
TERAJIMA SHIGERU
NAKAYAMA TAKAHIRO
NAKAYAMA TAKAHIRO
Application Number:
JP2017223932A
Publication Date:
June 20, 2019
Filing Date:
November 21, 2017
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; B29C59/02
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu