Title:
Imprint mold and imprint equipment
Document Type and Number:
Japanese Patent JP6361303
Kind Code:
B2
Inventors:
Tomoya Uchida
Takaaki Hiraka
Takaaki Hiraka
Application Number:
JP2014122293A
Publication Date:
July 25, 2018
Filing Date:
June 13, 2014
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; B29C33/38; B29C59/02
Domestic Patent References:
| JP2012204722A | ||||
| JP2012146699A | ||||
| JP2012124390A | ||||
| JP2008296579A | ||||
| JP2009532909A | ||||
| JP2008509825A | ||||
| JP2010179655A | ||||
| JP47037700B1 | ||||
| JP2009536591A | ||||
| JP2010272854A |
Foreign References:
| US20110180964 |
Attorney, Agent or Firm:
Masataka Ota
Junzo Yoneda
Junzo Yoneda