Title:
ＲＦスイッチにおける改善されたコンタクト
Document Type and Number:
Japanese Patent JP6853248
Kind Code:
B2
Abstract:
The present invention generally relates to a mechanism for making a MEMS switch that has a robust RF-contact by avoiding currents to run through a thin sidewall in a via from the RF-contact to the underlying RF-electrode.
Inventors:
Robertus Petrus van Kampen
James Douglas Huffman
Michael Renault
Shivajoti Gauche Dustyder
Jack Marcel Muyango
James Douglas Huffman
Michael Renault
Shivajoti Gauche Dustyder
Jack Marcel Muyango
Application Number:
JP2018525406A
Publication Date:
March 31, 2021
Filing Date:
November 14, 2016
Export Citation:
Assignee:
CAVENDISH KINETICS, INC.
International Classes:
H01H59/00
Domestic Patent References:
| JP2003249136A | ||||
| JP2014525665A | ||||
| JP8022727A | ||||
| JP2011181315A |
Foreign References:
| WO2015017743A1 | ||||
| WO2011036808A1 | ||||
| WO2004015728A1 | ||||
| WO2014209556A1 |
Attorney, Agent or Firm:
Takuji Yamada
Haruo Nakano
Haruo Nakano