To improve a service life of a lamp, mostly on a lamp filament, for use in a semiconductor processing reactor in which a high energy radiation heating is conducted.
The lamp is provided with a supporting part 42 which is improved so that a lamp filament 14 can be placed in a lamp sleeve in an axial direction. The supporting part 42 as shown in a drawing is a spiral coil having a central part of a small diameter contacting the filament 14. At both ends of a filament contacting part, the coil is expanded to a larger diameter so that it contacts an inner wall of a quartz sleeve which houses the filament 14. Therefore, the supporting part 42 appears in an H shape in a side view. The lamp filament 14 is also provided with an expansion compensating part 74 on both sides of the central part 72. A filament wire of the expansion compensating part 74 is wound and becomes a coil of a larger diameter as compared with the coil in the central part 72 and of a wider gap between winding wires. The expansion compensating part 74 is preferably elastic in compression and thus a heat expansion of the filament 14 while in operation can be absorbed and a short circuit of the filament 14 can be prevented throughout neighboring wires.
Kakehi Yuro
Tachibana Kenji
Next Patent: PLUG SOCKET