Title:
IMS ANALYZER
Document Type and Number:
Japanese Patent JP2022108494
Kind Code:
A
Abstract:
To provide an analyzer that can stabilize the amount of generation of primary ions and stabilize an analysis result.SOLUTION: An IMS analyzer 40 comprises an electron emission element 2, a collector 6, an electric field forming unit 7, and a control unit 12. The electron emission element has a bottom electrode 3, a surface electrode 4, and an intermediate layer 5 arranged between the bottom electrode and the surface electrode. The control unit is provided to apply voltage between the bottom electrode and the surface electrode. The collector and the control unit are provided to measure a current waveform of a current that flows upon arrival of ions at the collector. The control unit is provided to perform first adjustment of adjusting the magnitude of the voltage applied between the bottom electrode and the surface electrode based on the current waveform, and provided to perform second adjustment of adjusting the duty ratio when applying the voltage between the bottom electrode and the surface electrode based on the current waveform.SELECTED DRAWING: Figure 1
More Like This:
Inventors:
MORIYA SHOZO
IWAMATSU TADASHI
MORIMOTO SATOSHI
KUNOKI YOSHIHIKO
SHINKAWA KOJI
KOMARU SHOHEI
MATSUO SHUNSUKE
IWAMATSU TADASHI
MORIMOTO SATOSHI
KUNOKI YOSHIHIKO
SHINKAWA KOJI
KOMARU SHOHEI
MATSUO SHUNSUKE
Application Number:
JP2021003518A
Publication Date:
July 26, 2022
Filing Date:
January 13, 2021
Export Citation:
Assignee:
SHARP KK
International Classes:
G01N27/622; G01N27/64; H01J49/00; H01J49/14; H01J49/40
Attorney, Agent or Firm:
Shintaro Nogawa
Shinji Kai
Yusuke Kaneko
Kiyoshi Inamoto
Masami Tomita
Shinji Kai
Yusuke Kaneko
Kiyoshi Inamoto
Masami Tomita