Title:
INDENTATION HARDNESS TESTING METHOD
Document Type and Number:
Japanese Patent JPS6488336
Kind Code:
A
Abstract:
PURPOSE: To measure not only the hardness of a sample but the film thickness of a thin film material by pushing an indenter into the sample of a thin film which is placed on a base.
CONSTITUTION: From data of a load and indentation depth which are collected when an indenter 1 is pushed into a thin film sample 2, hardness of the sample 2 is calculated. Also, when the indenter 1 is pushed into a base 3 side and a load - indentation depth diagram is derived, since the hardness of the sample 2 and the base 3 is different, the film thickness of the sample 2 can be derived by deriving an intersection of said diagram and a diagram obtained at the time of pushing the indenter 1 into the sample 2.
Inventors:
TANAKA YASUNOBU
Application Number:
JP24699887A
Publication Date:
April 03, 1989
Filing Date:
September 30, 1987
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01N3/40; G01N3/42; (IPC1-7): G01N3/40; G01N3/42
Domestic Patent References:
| JPS6059948U | 1985-04-25 |
Attorney, Agent or Firm:
Hiroshi Sugawara