Title:
INERTIAL MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2023070787
Kind Code:
A
Abstract:
To provide an inertial measurement device capable of reducing a possibility of the intrusion of water into a first package made of a material including a resin.SOLUTION: An inertial measurement device includes: a substrate; a sealing member; a first inertial sensor module including a first inertial sensor and a first package accommodating the first inertial sensor; and a second sensor module including a second inertial sensor and a second package accommodating the second inertial sensor. A material of the first package includes a resin and a material of the second package is not a resin. The first inertial sensor module is accommodated in a space between the substrate and the sealing member to be hermetically sealed. The second inertial sensor module is provided in the outside of the space between the substrate and the sealing member.SELECTED DRAWING: Figure 1
Inventors:
WATANABE TORU
Application Number:
JP2021183112A
Publication Date:
May 22, 2023
Filing Date:
November 10, 2021
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01C19/5783; G01P15/08; G01P15/18; H01L23/02; H01L23/08
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura