Title:
急速熱処理(RTP)システムのための膨張可能なエラストマエレメント
Document Type and Number:
Japanese Patent JP3958931
Kind Code:
B2
Abstract:
A rapid thermal processing (RTP) chamber is disclosed, wherein a transparent plate and a body are sealed with a gas tight seal, and wherein the gas tight seal is activated by inflating an inflatable element.
Inventors:
Helmut Ashner
Helmut Merkure
Ulrich Valk
Dieter Zell Nickel
Helmut Merkure
Ulrich Valk
Dieter Zell Nickel
Application Number:
JP2000503268A
Publication Date:
August 15, 2007
Filing Date:
July 10, 1998
Export Citation:
Assignee:
STEAG RTP Systems GmbH
International Classes:
F27B5/10; C23C16/44; H01L21/26; C30B25/08; C30B31/10; C30B35/00; F27D7/06; H01L21/00
Domestic Patent References:
| JP613324A | ||||
| JP10510397A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Toshiomi Yamazaki
Takuya Kuno