Title:
情報処理装置
Document Type and Number:
Japanese Patent JP3610108
Kind Code:
B2
Abstract:
An information processing apparatus utilizing a scanning tunnel microscope includes a probe, a detector for detecting the distance between the probe and an object opposed thereto, based on a physical interaction working between the probe and the object, an electrostatic actuator for displacing the probe, for adjusting the distance between the probe and the object: The electrostatic actuator includes mutually opposed two electrodes: A controller is provided for controlling the amount of charge to be accumulated between the electrodes, so as to maintain a desired distance between the probe and the object, based on the result of detection by the detector.
Inventors:
Takahiro Oguchi
Kunihiro Sakai
Kunihiro Sakai
Application Number:
JP2121595A
Publication Date:
January 12, 2005
Filing Date:
January 13, 1995
Export Citation:
Assignee:
Canon Inc
International Classes:
G01N37/00; G01B7/34; G01B9/00; G01N27/00; G01Q10/04; G01Q60/10; G01Q60/16; G01Q80/00; G11B9/00; G11B9/06; G11B9/14; H01J37/28; (IPC1-7): G11B9/14; G01N13/12
Domestic Patent References:
| JP6208735A | ||||
| JP4090150A | ||||
| JP7260802A | ||||
| JP62281138A |
Attorney, Agent or Firm:
Tatsuya Nagao