Title:
INFRARED SENSOR
Document Type and Number:
Japanese Patent JP2002340678
Kind Code:
A
Abstract:
To provide an infrared sensor allowing an operation inspection by an inexpensive method.
This infrared sensor is provided with a membrane 3 formed on a silicon substrate 1 and thermocouples 4 and 5 formed on the membrane 3, winch generate electromotive force on the basis of a temperature difference generated in the receipt of infrared ray. The membrane 3 is provided with a heater wire 7 for generating the temperature difference in the thermocouples 4 and 5.
Inventors:
HAMAMOTO KAZUAKI
TOYODA INEO
TOYODA INEO
Application Number:
JP2001148249A
Publication Date:
November 27, 2002
Filing Date:
May 17, 2001
Export Citation:
Assignee:
DENSO CORP
International Classes:
G01J1/00; G01J1/02; G01J5/00; G01J5/02; G01J5/12; G01J5/14; (IPC1-7): G01J5/00; G01J1/00; G01J1/02; G01J5/02
Attorney, Agent or Firm:
Yoji Ito (2 outside)
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