Title:
Inkjet head manufacturing equipment and inkjet head manufacturing method
Document Type and Number:
Japanese Patent JP6357048
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an ink jet head manufacturing apparatus which can process a fine groove without breakage and bending of a tool blade when performing fine groove processing with ultrasonic processing to a piezoelectric member of an ink jet head.SOLUTION: An ink jet head manufacturing apparatus comprises: a base 18 fixing a piezoelectric member having a surface to be processed to which a plurality of grooves along the arrangement direction of ink holes are processed; a processing tool 11 which has in one direction a plurality of blades 17 with the uneven shape corresponding to the shape of the plurality of grooves of the piezoelectric member 10; an ultrasonic processing part which performs positioning of the processing tool with respect to the piezoelectric member, application of pressing force from the blades to the surface to be processed to the processing tool and application of ultrasonic vibration to the blades; a load sensor 45 which detects the magnitude of the load on the contact area between the blades and the surface to be processed with the pressing force of the ultrasonic processing part; and a controller 20 of the ultrasonic processing part which controls the magnitude of the load from the load sensor to be constant.SELECTED DRAWING: Figure 1
Inventors:
Masashi Shimosato
Application Number:
JP2014161440A
Publication Date:
July 11, 2018
Filing Date:
August 07, 2014
Export Citation:
Assignee:
Toshiba Corporation
TOSHIBA TEC CORPORATION
TOSHIBA TEC CORPORATION
International Classes:
B41J2/16; B24B1/04; B41J2/14; H01L41/09; H01L41/337
Domestic Patent References:
| JP2004001126A | ||||
| JP8279631A | ||||
| JP8229781A | ||||
| JP53135095A |
Attorney, Agent or Firm:
Amagi International Patent Office