To provide an inner periphery polishing method for polishing a hole drilled at the center of a disc-like substrate very precisely.

The inner periphery polishing method comprises steps of: (S103) inserting a brush into the hole drilled in the disc-like substrate having the hole at the center; (S105) fixing one end and the other end of the brush to a pair of rotary shafts provided at positions where they are apart from each other; and (S108) rotating at least either of the brush and the disc-like substrate, and polishing it.