Title:
INORGANIC POLYMER THIN FILM
Document Type and Number:
Japanese Patent JP2803602
Kind Code:
B2
Abstract:
PURPOSE: To produce a high molecular metallic polymer low in residual org. matter and uniform in stoichiometric ratio by forming an amorphous inorg. polymer thin film consisting of a specified metal oxide on a substrate.
CONSTITUTION: A light generated from a light irradiation device 2 such as UV ray lamp is reflected with a mirror 8 and applied on a container 6 provided on a stirrer 5 and housing a soln. containing metal alkoxide and stirred with a stirrer. After sufficiently propagating sol.gel reaction by light-irradiating for a fixed time, the mirror 8 is took up on a monochromator. Then, after forming a film by immersing the substrate 9 having ≤300°C decomposition temp. in a reaction soln. through a immersing device 4, the substrate 9 is took up, and the amorphous inorg. polymer thin film consisting of the metal oxide containing an oxygen more than 86 atom % by stoichiometric composition, and C-H bond having 0.01-4 atom % carbon is formed on the substrate 9 by light-irradiating for a fixed time.
Inventors:
Tomoji Oishi
Takahashi Lab
Tetsuo Nakazawa
Shigeru Tanaka
Tadahiko Miyoshi
Takahashi Lab
Tetsuo Nakazawa
Shigeru Tanaka
Tadahiko Miyoshi
Application Number:
JP23230395A
Publication Date:
September 24, 1998
Filing Date:
September 11, 1995
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B41M5/26; B01J19/00; B01J19/12; C01B13/32; C01B17/20; C01B33/12; C01G15/00; C01G19/02; C01G23/04; G11B7/24; G11B7/24015; G11B7/24047; G11B7/243; G11B7/2433; H01G4/33; H01L21/314; (IPC1-7): C01B13/32; B01J19/00; B01J19/12; B41M5/26; C01B17/20; C01B33/12; C01G15/00; C01G19/02; C01G23/04; G11B7/24; H01G4/33; H01L21/314
Attorney, Agent or Firm:
Ogawa Katsuo