Title:
INSPECTING APPARATUS
Document Type and Number:
Japanese Patent JP3265133
Kind Code:
B2
Abstract:
PURPOSE: To decrease the tact time by receiving a material whose inspection has been finished, at the other holding part of a containing station of a table with a moving device for containing when a material to be inspected is moved and mounted on a holding part, which is stopped at a supplying station of the turntable of a phase device for supplying.
CONSTITUTION: A supplying handling device 46 of a commonly used moving device 40 is moved to a supply stage 13 by an orthogonal type robot 41 and picks up an IC 1 in an actual tray 14. The device 46 is moved to a standby stage 20, and the IC is mounted on a pocket 23, which is stopped at a supply station 24 of a turntable 21. At this time, a containing handling device 47 picks up an IC IA, whose inspection is finished, in the other pocket 23. The device 47 is moved to a containing stage 15 by the robot 41 together with the device 46. The ICs are received in a good-product tray and a defective-product tray 17. Then, the device 46 returns to the stage 13, picks up the next IC1 and repeats the same work. Thus, the parallel processing of the moving works can be performed at the same time between the stages 13 and 20, and between the stages 20 and 15 for the ICs 1 and 1A.
Inventors:
Hisashi Imagawa
Nobuo Murakami
Nobuo Murakami
Application Number:
JP22111494A
Publication Date:
March 11, 2002
Filing Date:
August 23, 1994
Export Citation:
Assignee:
株式会社日立製作所
日立東部セミコンダクタ株式会社
日立東部セミコンダクタ株式会社
International Classes:
B65G29/00; H01L21/66; G01R31/26; H01L21/677; H01L21/68; (IPC1-7): G01R31/26; H01L21/66
Domestic Patent References:
| JP6177583A | ||||
| JP60223198A |
Attorney, Agent or Firm:
Tatsuya Kajiwara