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Title:
INSPECTING DEVICE FOR ELECTRONIC COMPONENT AND CONTACT PROBE
Document Type and Number:
Japanese Patent JP2000155129
Kind Code:
A
Abstract:

To lower cost, increase positioning accuracy, and to enable adaptation to narrow-pitch and many-pin constitution.

This electronic component inspecting device is equipped with a contact probe 1, having contact pins 2a which are brought into contact with electrode terminals P of an electronic component C to perform electric inspection, probe support mechanisms (3 and 4) which position and support the contact probe 1, and a component holding mechanism 5, which positions the electronic component C and hold the contact pins 2a and electrode terminal P in contact. The contact probe 1 comprises a tape-like film 7 and pattern wires 2 formed on the surface of the film 7, device holes 7a which are separated from one another along the length of the film 7 are formed on the film 7, and the pattern wires 2 are arranged having their tips projected into the device holes 7a to form contact pins 7a.


Inventors:
SUGIYAMA TATSUO
YOSHIDA HIDEAKI
Application Number:
JP32867698A
Publication Date:
June 06, 2000
Filing Date:
November 18, 1998
Export Citation:
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Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
G01R1/06; G01R1/073; H01L21/66; G01R31/26; (IPC1-7): G01R1/06; G01R1/073; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Masatake Shiga (9 outside)



 
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