PURPOSE: To obtain the color image of a board without using any expensive color TV camera by using a lighting part which scans white beam light and a photoelectric transducer provided with optional filters of different colors.
CONSTITUTION: A G-color detector 7 is equipped with a phototransistor Tr 42 and a G-color filter 44 and a B-color detector 8 is equipped with a phototransistor Tr TR 43 and a B-color filter 45. A control part 36 turns on the lighting part 10 to convert light reflected by a printed board 25-2 to be inspected into an electric signal by the Trs 42 and 43 while making an X-Y scan on the printed board 25-2 to be inspected with the white beam light P. A control part 36, on the other hand, inputs the G primary color signal and B primary color signal of the board 25-2 obtained by said converting operation to an image input part 32 to generate GB primary color image data. Then, the control part 36 transfers this data to an image processing part 33 to generate a subtraction video signal G-B. Further, the control part 36 checks whether or not all parts 28-1W28-n are present by a decision part 35.
| JPH0299804 | MEASUREMENT OF SHAPE OF RESIST PATTERN |
| JPH09289238 | EVALUATION METHOD OF SEMICONDUCTOR SUBSTRATE |
YAGAWA TOSHIO
TANIMURA SHIGERU
