Title:
INSPECTION APPARATUS FOR OUTER SURFACE OF SOLDER, ETC., AND MICROSCOPE USED THEREFOR AS WELL AS MICROSCOPE HEAD
Document Type and Number:
Japanese Patent JP2003121130
Kind Code:
A
Abstract:
To measure the surface state of a small object in a narrow place.
In a microscope in which an optical system is internally mounted on a shaft and which is provided with a wedge-shaped prism at its tip, two light sources are arranged downward at the upper end face of the prism, and its lower part is cut obliquely so as to form a mirror surface.
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Inventors:
WATANABE HIROSHI
Application Number:
JP2001315623A
Publication Date:
April 23, 2003
Filing Date:
October 12, 2001
Export Citation:
Assignee:
DEN ON INSTR CO LTD
International Classes:
G01B11/30; G02B21/06; G02B21/24; (IPC1-7): G01B11/30; G02B21/06; G02B21/24
Attorney, Agent or Firm:
Suzuki Seiji
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