To provide an inspection apparatus capable of accurately detecting foreign substances in a sheet and contamination of both front and back surfaces of the sheet.
The inspection apparatus includes: first light sources 1 to be disposed on one side of an inspection object sheet S; a second light source 2 to be disposed on the other side of the inspection object sheet S; a CCD camera 3 and the like having an imaging element to receive light emitted from the first light sources 1 and reflected to the one side by the inspection object sheet S and a light emitted from the second light source 2 and permeating the inspection object sheet S to reach the one side; and an image processing section 4 for processing an image signal to be output from the imaging element. The light to be emitted from the first light sources 1 are blue light which is of complementary color of yellowish contamination adhered to the inspection object sheet S, and the light to be emitted from the second light source 2 is red light.
COPYRIGHT: (C)2010,JPO&INPIT
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| JPH04259850 | LIGHT SOURCE APPARATUS FOR SURFACE INSPECTING APPARATUS |
| JP2015036655 | INSPECTION UNIT |
| JP2001041900A | 2001-02-16 | |||
| JP2006138683A | 2006-06-01 | |||
| JP2001318059A | 2001-11-16 | |||
| JP2008122130A | 2008-05-29 | |||
| JP2002172762A | 2002-06-18 | |||
| JPS639852A | 1988-01-16 | |||
| JP2007279064A | 2007-10-25 | |||
| JP2001099786A | 2001-04-13 | |||
| JP2001041900A | 2001-02-16 | |||
| JP2006138683A | 2006-06-01 | |||
| JP2001318059A | 2001-11-16 | |||
| JP2008122130A | 2008-05-29 | |||
| JP2002172762A | 2002-06-18 | |||
| JPS639852A | 1988-01-16 |
Yoshiyuki Matsushima
Akihisa Iwamoto
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