Title:
INSPECTION APPARATUS
Document Type and Number:
Japanese Patent JP2022170822
Kind Code:
A
Abstract:
To provide an inspection apparatus having a configuration that allows illumination light to be incident on an original plate deflection correcting member at a large angle of incidence.SOLUTION: An inspection apparatus includes: an original plate having a first surface on which a pattern is formed and a second surface opposite to the first surface; an original plate deflection correction member having a third surface and a fourth surface opposite to the third surface, and placed apart from the original plate so that the third surface faces the second surface; a holding unit placed on the original plate and holding the original plate deflection correction member so as to form an airtight space between the second surface and the third surface; an illumination unit emitting illumination light for illuminating an inspection area on the fourth surface; and a light receiving unit receiving scattered light scattered by foreign matter in the inspection area. A reflective surface is formed on the holding unit, and the illumination light is reflected by the reflective surface and then enters the inspection area.SELECTED DRAWING: Figure 1
Inventors:
ABE RYOSUKE
MAEDA KOHEI
MAEDA KOHEI
Application Number:
JP2021077047A
Publication Date:
November 11, 2022
Filing Date:
April 30, 2021
Export Citation:
Assignee:
CANON KK
International Classes:
G01N21/88; G01N21/84; G03F1/84; G03F7/20
Attorney, Agent or Firm:
Okabe
Takao Ochi
Koji Yoshizawa
Aki Honda
Takao Ochi
Koji Yoshizawa
Aki Honda