To automatically prepare inspection data only by relating the images of various inspection objects to the examination objects and storing them beforehand by specifying the position of the inspection object in an area to be inspected on the basis of the image of the inspection object stored related to examination information.

In a method for preparing the inspection data of an area P to be inspected including plural inspection objects A, B and C, the images of the respective inspection objects A, B and C are previously picked up for each kind, the obtained images are stored as inspection object images related to the inspection information, the image of the area P to be inspected is picked up as an area image to be inspected, the positions of the respective inspection objects A, B and C in the area P to be inspected are searched by matching the part of the area image to be inspected and the inspection object images and the searched positions of the inspection objects A, B and C and the inspection information corresponding to the inspection object images are synthesized so that the inspection data of the area P to be inspection can be prepared.