Title:
CHECK DEVICE, CHECK METHOD, AND PROGRAM
Document Type and Number:
Japanese Patent JP2022124812
Kind Code:
A
Abstract:
To provide a check device capable of easily preparing a reference image.SOLUTION: A check device 100 checks a workpiece W having an outer periphery which has a form rotationally symmetrical about a symmetry axis AX4 or has a pattern provided repeatedly at a cycle of 2π/n. The check device 100 comprises an imaging unit 3 which moves in a circumferential direction about the symmetry axis AX4 with respect to the workpiece W to capture a plurality of images of the outer periphery including n first images A at approximately equal intervals in the circumferential direction, a RAM 53 in which the n first images A are stored, a reference image generation unit 511 which generates a first reference image R1 by using values of m pixels of which the positions in appearance of the outer periphery in the images are identical between m first images for generation being m first images A, and a determination unit 512 which compares a sample image being one of the n first images to the first reference image R1 to determine whether a defect is present in the outer periphery at a position where the sample image has been captured.SELECTED DRAWING: Figure 1
Inventors:
ONISHI HIROYUKI
Application Number:
JP2021022668A
Publication Date:
August 26, 2022
Filing Date:
February 16, 2021
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
G01N21/88; G01N21/95
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita
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