Title:
Inspection device
Document Type and Number:
Japanese Patent JP6220521
Kind Code:
B2
Abstract:
An inspection apparatus comprising, an optical system emitting light having a predetermined wavelength, illuminating a sample while the light is converted into light having a polarization plane not in the range of −5 degrees to 5 degrees and 85 degrees to 95 degrees with respect to a direction of a repetitive pattern on the sample, an optical system for acquiring an image and forming said image on an image sensor using a lens, a half-wave plate, a first image sensor, a second image sensor, an inspection analyzer, wherein these differ in a transmission axis direction, a processor that obtains an average gray level and a standard deviation in each predetermined unit region of the image, and a defect detector, wherein a resolution limit defined by a wavelength of the light source and a numerical aperture of the lens is a value in which the pattern is not resolved.
Inventors:
Chikara Ogawa
Hiroto Hirotoshi
Hiroshi Inoue
Hiroto Hirotoshi
Hiroshi Inoue
Application Number:
JP2013007793A
Publication Date:
October 25, 2017
Filing Date:
January 18, 2013
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
G01N21/956; G03F1/84
Domestic Patent References:
| JP2009192520A | ||||
| JP2012185178A | ||||
| JP2007225341A | ||||
| JP2002221495A | ||||
| JP2006047308A |
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Atsuko Oaku
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Atsuko Oaku