Title:
検査装置、及び加工装置
Document Type and Number:
Japanese Patent JP7282461
Kind Code:
B2
Abstract:
An inspecting apparatus for inspecting a test piece. The inspecting apparatus includes a test piece holding mechanism for holding the test piece, the test piece holding mechanism having a mounting portion formed from a transparent member having upper and lower exposed surfaces, the upper exposed surface of the transparent member functioning as a mounting surface for mounting the test piece, whereby the test piece mounted on the mounting surface of the mounting portion is adapted to be held by the test piece holding mechanism. The inspecting apparatus further includes an imaging mechanism for imaging the test piece held by the test piece holding mechanism, the imaging mechanism having a first imaging unit provided above the mounting portion, a second imaging unit provided below the mounting portion, and a connecting portion for connecting the first imaging unit and the second imaging unit.
Inventors:
Tomoaki Sugiyama
Hirohiko Kozai
Naoki Morikawa
Hirohiko Kozai
Naoki Morikawa
Application Number:
JP2019077853A
Publication Date:
May 29, 2023
Filing Date:
April 16, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; H01L21/66; H01L21/677; H01L21/683
Domestic Patent References:
| JP2019025583A | ||||
| JP2012256749A | ||||
| JP2018107309A | ||||
| JP2014022575A | ||||
| JP63093130A | ||||
| JP2017527990A | ||||
| JP2008053624A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
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