PURPOSE: To enable accurate measurement of a resistance value between terminals with a stable contact resistance value by bringing a probe closer to a terminal at a low speed to contact with the application of a specified amount of forcing.
CONSTITUTION: Probe units 5a and 5b having probes 4a and 4b are arranged on a top surface of a board 3 supported horizontally on a board receiving base 2 and a probe unit 5c for adapted to contact a probe 4c is arranged on the underside of the substrate 3. The lifting of the probes 4a-4c is controlled with a control section 24 using a stepping motor. Each time the board 3 is carried into a receiving base 2, the probes 4a-4c are brought into contact with the substrate 3 at a specified speed to measure a contact position of the probes and contact points thereof arithmetically averaged are determined and stored with a microcomputer 26 to control an amount of forcing from the speed and the contact points. This enables accurate measurement of a resistance value between terminals with a stable contact resistance value without damaging terminals and the probes.
TAKAGAKI TADASHI
NUMATA KIYOSHI
OKAMOTO TSUNEHIRO
KAWAMURA NOBUTAKA
TOYOSHIMA HIRONOBU
HITACHI TECHNO ENG
| JPS6184951A | 1986-04-30 |