Title:
CUTTING DEVICE AND INSPECTION METHOD FOR CUTTING-EDGE DETECTION UNIT
Document Type and Number:
Japanese Patent JP2022115618
Kind Code:
A
Abstract:
To provide a cutting device that is able to properly determine a state of a cutting-edge detection unit.SOLUTION: A cutting device includes: a chuck table holding a work piece; a cutting unit including a spindle and that cuts the work piece, held by the chuck table, with an annular cutting blade attached to a tip of the spindle; a cutting-edge detection unit that detects a leading edge of the cutting blade; a determination unit that determines a state of the cutting-edge detection unit; and a notifying unit; wherein the cutting edge detection unit includes: a light-projecting unit and a light-receiving unit disposed so as to sandwich the leading edge of the cutting blade; and a received light quantity measurement unit that measures a quantity of light received by the light-receiving unit; wherein the determination unit determines a state of the cutting-edge detection unit by comparing a waveform indicating a change in the quantity of received light measured by the received light quantity measurement unit, with a reference waveform; and wherein the notifying unit that notifies a result of a determination made by the determination unit.SELECTED DRAWING: Figure 1
Inventors:
TAKAHASHI SATOSHI
KASAI TAKESHI
KASAI TAKESHI
Application Number:
JP2021012281A
Publication Date:
August 09, 2022
Filing Date:
January 28, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B27/06; B23Q17/09; B24B49/12; H01L21/301
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato