Title:
INSPECTION METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2016142567
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an inspection method and device capable of acquiring information only in a vertical direction after dividing thermal conduction into a horizontal direction and the vertical direction in a heating surface in order to extract a joint with high accuracy, in a thermal imaging method.SOLUTION: An inspection device includes: an illumination optical system for irradiating a sample; a detector for detecting the intensity of infrared of the sample irradiated by the illumination optical system; and a processor for dividing a direction of heat propagation of the sample at least into two on the basis of time change in the intensity of the infrared of the sample. Thus, the inspection device can extract a joint with high accuracy.SELECTED DRAWING: Figure 2
Inventors:
MITSUTA HIROKI
WATANABE MASAHIRO
NAKAO TOSHIYUKI
SERIKAWA SHIGERU
WATANABE MASAHIRO
NAKAO TOSHIYUKI
SERIKAWA SHIGERU
Application Number:
JP2015016806A
Publication Date:
August 08, 2016
Filing Date:
January 30, 2015
Export Citation:
Assignee:
HITACHI HIGH-TECH FINE SYSTEMS CORP
International Classes:
G01N25/72; G01N25/18
Attorney, Agent or Firm:
Aoritsu patent business corporation
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