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Title:
INSPECTION METHOD OF INSPECTED OBJECT
Document Type and Number:
Japanese Patent JP2015227809
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an inspection method of an inspected object that can detect and discriminate even a relatively small metal powder existing in an inspected object.SOLUTION: An inspected object inspection method is configured to: use a device having an X-ray source and an electronic image pickup element; insert an inspected object made up of a non-metal between the X-ray source and the electronic image pickup element; photograph the inspected object; and detect a metal powder existing in the inspected object as a foreign matter. Let a distance between the X-ray source and the electronic image pickup element be X(mm), a distance between the X-ray source and the inspected object be Y(mm), a maximum thickness in an X-ray irradiation direction of the inspected object be H(mm), and a diagonal length of one pixel of a pixel element of the electronic image pickup element be Z(mm), the inspected object inspection method is configured to satisfy 1≤Z*(Y+H)*1000/X≤20.

Inventors:
KAMANO YODAI
Application Number:
JP2014113380A
Publication Date:
December 17, 2015
Filing Date:
May 30, 2014
Export Citation:
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Assignee:
SUMITOMO BAKELITE CO
International Classes:
G01N23/04; G01B11/02; G01V5/00
Domestic Patent References:
JP2009236637A2009-10-15
JP2010127702A2010-06-10
JP2005030966A2005-02-03
JP2011196778A2011-10-06
JP2009128323A2009-06-11
JP2013047673A2013-03-07
JP2004309139A2004-11-04
JPH10208046A1998-08-07
JP2008157821A2008-07-10
JPH0743320A1995-02-14
Foreign References:
WO1999042818A11999-08-26
Other References:
データシート 130KV MICROFOCUS X-RAY SOURCE L9181-02, JPN7019003197, ISSN: 0004127414
カタログ X線TDIカメラC10650シリーズ, JPN7019003198, ISSN: 0004127415
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi