Title:
INSPECTION METHOD OF RECORDING MEDIUM, OPTICAL DISK SUBSTRATE AND STAMPER
Document Type and Number:
Japanese Patent JP2005196889
Kind Code:
A
Abstract:
To provide a method for measuring quantitatively the roughness of the surrounding geometry of a data mark in an optical disk substrate and a stamper.
This method inspects the geometry of the data mark from an observation image of the data mark formed on a recording medium and obtained by a observation apparatus. The inspection method of the recording medium is characterized by measuring a perimeter (PS) and an area (PA) of the data mark and by finding its ratio (PS/PA).
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Inventors:
UMEZAWA TOMOKAZU
FUJIMARU SHIGEKI
FUJIMARU SHIGEKI
Application Number:
JP2004002953A
Publication Date:
July 21, 2005
Filing Date:
January 08, 2004
Export Citation:
Assignee:
TEIJIN CHEMICALS LTD
International Classes:
G11B7/26; (IPC1-7): G11B7/26
Attorney, Agent or Firm:
Masataka Oshima
Taizo Shiraishi
Taizo Shiraishi