To evaluate the reliability of detected data and to facilitate separation of the place of a cause when an error occurs in an inspection system in which detected data is processed by a data processing part and an inspection result is outputted.

Operating state information of a data detecting part is combined with detection data to be transmitted to a data processing part, and the data processing part recognizes the operating state of the data detecting part when the data is detected. It beomes easy, therefore, to separate an initial error cause place, such as a detection time point, a detected data transmitting time point and data processing part.