To disclose a system using a small-sized catadioptric objective.
The system uses various subsystems besides a small-sized objective to allow enhanced imaging. The subsystems include subsystems for illumination, imaging, autofocus, positioning, sensor, data acquisition, and data analysis. The objective is employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and elements of the objective are less than 100 mm in diameter. The objective comprises a focusing lens group (1607), at least one field lens (1605), and a Mangin mirror arrangement (1601). The field lens (1605) is oriented to receive focused light energy from the focusing lens group (1607) and provide intermediate light energy. This invention imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90 to a specimen for imaging purposes, and the invention may be employed in various environments.
JOSEPH J ARMSTRONG
DAVID R SHAFER
| JPH10177139A | 1998-06-30 | |||
| JP2001517806A | 2001-10-09 | |||
| JP2003161886A | 2003-06-06 | |||
| JP2007527545A | 2007-09-27 |