Title:
INSPECTION SYSTEM
Document Type and Number:
Japanese Patent JP2015172585
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an inspection system for creating images of a substrate.SOLUTION: A light source directs an incident light onto the substrate, and a light source timing control device controls a pulse timing of the incident light. A stage holds the substrate and moves the substrate under the incident light, so that the substrate reflects the incident light as a reflected light. A stage position sensor records a position of the stage, and a stage position control device controls the position of the stage. A time domain integration sensor receives the reflected light, and a time domain integration sensor timing control device controls a line shift of the time domain integration sensor. A control system controls the light source timing control device, the stage position control device, and the time delay integration sensor timing control device, and sets the pulse timing of the incident light, the position of the stage, and the line shift of the time delay integration sensor, such that a single line of the time domain integration sensor integrates reflected light from more than one pulse of the incident light from the light source.
Inventors:
GREGORY L KIRK
MATTHEW W DERSTINE
HWANG SHIOW-HWEI
ISABELLA T LEWIS
MATTHEW W DERSTINE
HWANG SHIOW-HWEI
ISABELLA T LEWIS
Application Number:
JP2015093852A
Publication Date:
October 01, 2015
Filing Date:
May 01, 2015
Export Citation:
Assignee:
KLA TENCOR CORP
International Classes:
G01N21/956; H01S3/00
Domestic Patent References:
| JPH11311608A | 1999-11-09 | |||
| JPH1114551A | 1999-01-22 | |||
| JP2003130808A | 2003-05-08 |
Attorney, Agent or Firm:
Meisei International Patent Office