PURPOSE: To unnecessiate a liquid crystal substrate, which is used as the reference of separate instructions, and to simplify an instruction method by a method wherein a liquid crystal substrate, which is used as an object of installation, is previously selected and an alignment mask is detected to correct the position of the substrate in directions θ, X and Y.
CONSTITUTION: An alignment mark (a) provided on a liquid crystal substrate 5 is taken an image by an optical system 51 and the position of the mark (a) is detected by the use of data on this imaged mark (a). The inclination in the direction θ of the substrate 5 is calculated from this position, a θ table 4 of a substrate mounting stage 1 is moved on the basis of an inclination computed value in this direction θto correct the inclination in the direction θ of the stage 5 on the stage 1, a change in the position of the substrate 5 in directions X and Y is calculated and X and Y tables 2 and 3 of the stage 1 are moved to correct the position of the substrate 5 in the directions θ, X and Y. Moreover, the stage 1 is moved to a position, where an outer lead of a TAB component (a carrier tape component) 10 is bonded to a terminal part 7 of the substrate 5, to instruct the bonding. Thereby, a liquid crystal substrate, which is used as the reference of a plurality of kinds of instructions, is unnecessitated and the simplification of a labor time for the instructions can be contrived.
JPS55120162 | SEMICONDUCTOR DEVICE |
JPS5913356 | LEAD FRAME |
WO/1995/027307 | PROCESS AND DEVICE FOR PRODUCING SOLDER HUMPS |