INSULATING FILM FORMING METHOD AND DEVICE THEREOF

Title:

INSULATING FILM FORMING METHOD AND DEVICE THEREOF

Document Type and Number:

Japanese Patent JPH05144801

Kind Code:

A

Abstract:

PURPOSE: To provide the title method and device with which an insulating film of good homogenous quality can be formed repeatedly.

CONSTITUTION: The title insulating film forming device is composed of a vapor- phase reaction device (its connection is indicated by the solid line in the diagram) and a control system (its connection is indicated by the broken line in the diagram). The above-mentioned vapor-phase reaction device is mainly composed of a reaction chamber 1 with which a vapor-phase reaction operation is conducted, and the control system, with which vapor-phase reaction will be controlled, is composed of an FT-IR 6 which observes the vapor-phase reaction in the reaction chamber 1, a detector 7 which detects the amount of subsrance grown by vapor-phase reaction based on the signal sent from the FT-IR 6, and a control device 8 with which the amount of substance grown by the treatment information, sent from the above-mentioned detector 7, is controlled uniformly. As a result, the condition of film formation can be properly controlled when necessary while the film is being formed.

Inventors:

MIYAZAKI YOSHIHISA
HASHIMOTO TAKESHI
OOTA TOMOHIRO

Application Number:

JP30915591A

Publication Date:

June 11, 1993

Filing Date:

November 25, 1991

Export Citation:

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Assignee:

KAWASAKI STEEL CO

International Classes:

B01J12/00; C23C14/54; C23C16/52; C30B25/14; C30B25/16; H01L21/31; H01L21/316; H01L21/3205; (IPC1-7): B01J12/00; C23C14/54; C23C16/52; C30B25/14; C30B25/16; H01L21/31; H01L21/316; H01L21/3205

Attorney, Agent or Firm:

Yoshiki Hasegawa (3 outside)

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