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Patent Searching and Data


Title:
INSULATING TYPE IONIZATION GAGE
Document Type and Number:
Japanese Patent JPS5991330
Kind Code:
A
Abstract:

PURPOSE: To prevent the effect of disturbance and to measure vacuum degree accurately, by providing a tubular electrode for preventing fluctuation in potential, which has the potential that is insulated from a potential of a part attached to a service port of a vacuum device, around an electrode assembly.

CONSTITUTION: An attaching flange 1 of an ionization gage is attached to a service or a vacuum container through attaching holes 1a. A circular cylinder shaped electrode 9, which is used for preventing fluctuation in potential in an electrode assembly comprising a filament 2, grids 3W6, and a collector 8, is arranged between the attaching flange 1 and an annular shaped mechanical protecting frame 7. In this constitution, even though a potential E of the attaching flange 1 is fluctuated, the potential of each electrode can be kept unchanged, the effect of disturbance is prevented, and the vacuum degree can be accurately measured.


Inventors:
YAMAGUCHI HISAO
MIZUNO MASAYASU
Application Number:
JP20029182A
Publication Date:
May 26, 1984
Filing Date:
November 17, 1982
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
B01J3/00; G01L21/30; (IPC1-7): B01J3/00
Domestic Patent References:
JPS5073684A1975-06-17
JPS55156825A1980-12-06
Attorney, Agent or Firm:
Shigeru Yagita