PURPOSE: To maintain sufficient characteristics in different kinds of semiconductor devices by providing in addition to a separated island having an entire bottom as deep as specified a separated island wherein a part of the bottom is as deep as specified and other parts are shallower.
CONSTITUTION: A semiconductor separation island 11 provided on an insulation separating substrate 10 is as deep as specified on the entire bottom. On the other hand the bottom of the semiconductor separation island 11 can be used as an island wherein a part of the bottom is as deep as specified and other parts are swollen to be shallower. Therefore manufacture is easy so that respective devices can have sufficient characteristics when a plural kinds of semiconductor devices with preferred island depths different are to be simultaneously formed.
IITAKA YUKIO
MATSUMOTO TAKESHI
JPS55115340A | 1980-09-05 | |||
JPS5627942A | 1981-03-18 | |||
JPS5910273A | 1984-01-19 | |||
JPH01169961A | 1989-07-05 |