PURPOSE: To simplify the configuration of an apparatus for the inspection of integrated circuit wiring and facilitate the addition of a means for large visual field observation.
CONSTITUTION: This apparatus inspects the internal wiring of a semiconductor integrated circuit as follows: the surface shape of a workpiece electrode is discriminated by a cantilever 1 having a conductive probe 2 on its end; the voltage impressed to the workpiece electrode is measured by applying the conductive probe 2 to the electrode, applying light to an electro-optic crystal 4 connected to the probe 2, and evaluating the resultant electro-optic effect. An optical system, including a light source 6 and the electro-optic crystal 4, is formed on a board 3 for holding the cantilever; a light receiving system, including a light receiver for detecting the light passing through the electro-optic crystal 4, is also formed on the cantilever holding board 3.
OZAKI KAZUYUKI
WAKANA SHINICHI
