Title:
統合微小電気機械スイッチおよびその関連方法
Document Type and Number:
Japanese Patent JP6781048
Kind Code:
B2
Abstract:
A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement.
Inventors:
Aimi, Marco Francesco
Spence, Dan Kenrick
Spence, Dan Kenrick
Application Number:
JP2016574280A
Publication Date:
November 04, 2020
Filing Date:
June 23, 2015
Export Citation:
Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
H01H59/00; B81B3/00
Domestic Patent References:
| JP2015501069A | ||||
| JP2009152195A |
Foreign References:
| US20130134018 |
Attorney, Agent or Firm:
Kazuya Sekiguchi