PURPOSE: To integrate plural laser light sources about their pitches, angles and modes with high density and high accuracy by setting up the waveguide pitches of the incident side of monolithically integrated optical waveguides smaller than that of the outgoing side.
CONSTITUTION: The waveguide pitches of the incident side of the monolithically integrated optical waveguides 105aW105c are set up smaller than that of the outgoing side and the outgoing directions of plural beams on the outgoing side are made different each other. For instance, a SiO2 layer with about 2μm thickness is formed on a silicon substrate by sputtering to obtain a buffer layer for an optical waveguide layer, coning #7059 is sputtering by 1μm to form the optical waveguide layer 110, and after forming a buffer layer 111 with 0.5μm thickness, the waveguide with 2μm width is formed by dry etching. Then, the whole layers are covered with a SiO2 sputtering film with 1μm thickness to form the waveguides. Angles formed by the waveguides 105aW105c and a face 106 are made different each other to project incident beams respectively in oblique directions.
NOJIRI HIDEAKI
SEKIGUCHI YOSHINOBU
HASEGAWA MITSUTOSHI
MIYAZAWA SEIICHI
