Title:
INTENSITY DAMPING MECHANISM OF ELECTRON MICROSCOPE WITH ELECTRONIC SPECTROMETER
Document Type and Number:
Japanese Patent JPH07335159
Kind Code:
A
Abstract:
PURPOSE: To prevent incidence of an electron beam from exceeding a measurable limit onto an image sensing device by deflecting the electron beam at certain periods using deflecting means in an electron spectrometer.
CONSTITUTION: An electron beam 2 is deflected at certain periods by deflecting means 9a, 9b in an electron spectrometer 8. The deflecting means 9a, 9b are operated so that the spectral image does not move on an image sensing device 12.
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Inventors:
KIMOTO KOJI
Application Number:
JP12854794A
Publication Date:
December 22, 1995
Filing Date:
June 10, 1994
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J37/05; H01J37/26; H01J49/44; (IPC1-7): H01J37/05; H01J37/26; H01J49/44
Attorney, Agent or Firm:
Ogawa Katsuo