Title:
INTERATOMIC FORCE MICROSCOPE
Document Type and Number:
Japanese Patent JP3021872
Kind Code:
B2
Abstract:
PURPOSE: To provide an interatomic force microscope capable of radiating the excitation light to a sample without being shielded by a cantilever.
CONSTITUTION: A probe 12 is provided at the free end of a cantilever 14, and both of them are made of an optically transparent material. The cantilever 14 is fitted to a disk-like glass plate 16 having an opening at the center so that the probe 12 is located at the center of the opening. An optically transparent conducting film 18 is provided below the probe 12, cantilever 14, and glass plate 16, and an interference reflecting film 20 is provided above the free end section of the cantilever 14 (the face on the opposite side to the probe 12). The interference reflecting film 20 reflects only the displacement detection light from an optical fiber interferometer within the light emitted from the optical fiber 34 and transmits the other light. The glass plate 16 is fitted to a support member 22 together with an objective lens 24, and it is supported by a cylindrical piezoelectric actuator 26.
Inventors:
Takase Tsugiko
Application Number:
JP30599891A
Publication Date:
March 15, 2000
Filing Date:
November 21, 1991
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G01B21/30; G01N21/63; G01N37/00; G01Q20/02; G01Q30/02; G01Q60/04; G01Q60/10; G01Q60/24; H01J37/28; (IPC1-7): G01B21/30
Domestic Patent References:
| JP32503A |
Attorney, Agent or Firm:
Takehiko Suzue
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