Title:
INTERATOMIC FORCE MICROSCOPE/SCANNING TYPE TUNNEL MICROSCOPE AND CONTROLLING METHOD THEREOF
Document Type and Number:
Japanese Patent JPH04361110
Kind Code:
A
Abstract:
PURPOSE:To enable observation of a substance distribution of the surface of a sample wherein a plurality of substances being different in electric characteristics even when they are identical in electroconductivity under a specific bias voltage exist mixedly, and also measurement of detailed electronic characteristics such as surface state density, in a scanning type probe microscope constructed by compounding an interatomic force microscope and a scanning type tunnel microscope. CONSTITUTION:A sample 1 is put on an X-Y-Z-axis piezoelectric element 2e and a probe 2a is disposed in proximity to the surface thereof. In this state, the relative positions in directions of the axes X and Y of the sample 1 and the probe 2a are scanned and controlled by a scanning-wave generating circuit 4, interatomic forces acting at this time are detected by a laser emitter 2c and a photodetector 2d and a distance in the direction of the axis Z between the sample 1 and the probe 2a is controlled by a feedback control circuit 3 so that it be a prescribed one. A bias voltage impressed between the sample 1 and the probe 2a on the occasion is changed with a high frequency of a prescribed waveform by a bias voltage control circuit 5, and thereby measurement of the electric scanning characteristics of the sample 1 at each X-Y scanning point is enabled.
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Inventors:
YAMAZAKI KENJI
TORII YASUHIRO
TAKEUCHI NOBUYUKI
TORII YASUHIRO
TAKEUCHI NOBUYUKI
Application Number:
JP13621391A
Publication Date:
December 14, 1992
Filing Date:
June 07, 1991
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01B21/30; G01N37/00; G01Q60/04; G01Q60/10; G01Q60/12; G01Q60/18; G01Q60/38; (IPC1-7): G01B21/30
Attorney, Agent or Firm:
Fujiya Shiga