Title:
INTERFACE DETECTION SENSOR
Document Type and Number:
Japanese Patent JP2022142191
Kind Code:
A
Abstract:
To provide an interface detection sensor that can detect interfaces with a simple configuration.SOLUTION: An interface detection sensor 1 includes a light emitting unit 10 having a first light emitter 11 that emits first detection light L1 and a second light emitter 12 that emits second detection light L2, a light receiving unit 20 that receives the first detection light and the second detection light and outputs a light receiving signal SG1, and a control unit 40 that controls the light emitting unit so as to emit light in two of the following patterns: an emission pattern in which the light is emitted so that the light receiving unit receives both the first and second detected light simultaneously, an emission pattern in which the light receiving unit receives only the first detection light, and an emission pattern in which the light receiving unit receives only the second detection light. The control unit extracts a feature quantity indicating a label pattern that is a combination pattern of the number of layers of a sample, an upper end position of an identification label 52 and a lower end position of the identification label from the light receiving signal, determines the label pattern based on the feature quantity, and detects an interface of the sample from the light receiving signal based on the label pattern.SELECTED DRAWING: Figure 1
Inventors:
NAGASAKA KENSHIRO
SASAKI TOSHIKI
MATSUURA TAKAYASU
ZHENG WANG
OKUNO TOMOYA
SASAKI TOSHIKI
MATSUURA TAKAYASU
ZHENG WANG
OKUNO TOMOYA
Application Number:
JP2021042267A
Publication Date:
September 30, 2022
Filing Date:
March 16, 2021
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
G01N35/00
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda