Title:
INTERFERENCE MICROSCOPE
Document Type and Number:
Japanese Patent JP3443156
Kind Code:
B2
Abstract:
PURPOSE: To observe differential interference, and vary a sharing quantity on a sample surface by respectively using diffraction gratings as a wave surface dividing means and a wave surface synthesizing means.
CONSTITUTION: A bundle of rays emitted from an illuminating light source is introduced to a band-pass filter 9, and only light in a specific wave length area enters a phase grating la as a wave surface dividing means, and becomes two bundles of rays having an equal phase, and passes through a condenser lens 2, and perform Koehler illumination on a sample 4. They are projected outside of an objective lens by using a pupil relay lens 10, and a phase grating 1b as a wave surface synthesizing means in the same with the phase grating 1a as the wave surface dividing means is arranged in a rear side focal position of the projected objective lens 5. In this way, the two bundles of rays passing through the objective lens 5 enters the phase grating 1b as the wave surface synthesizing means after passing through the pupil relay lens 10. The two bundles of rays are again synthesized together, and a interferential image is formed in an image forming position 8 by an interfered image forming lens 7, and can be observed or measured by an observing system such as an eyepiece or a TV.
Inventors:
Shingo Kashima
Application Number:
JP6605094A
Publication Date:
September 02, 2003
Filing Date:
April 04, 1994
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G02B21/14; (IPC1-7): G02B21/14
Domestic Patent References:
| JP5636621A |
Attorney, Agent or Firm:
Taiji Shinohara
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