Title:
特殊光学系の使用のための干渉システム
Document Type and Number:
Japanese Patent JP2007531887
Kind Code:
A
Abstract:
An interferometric system which includes an illumination arm having a light source and an illumination optical system for forming an illumination beam path; an object arm having a special-purpose optical system for measuring an object for the purpose of forming an imaging beam path; a reference arm having an adjusting element and a reference element coupled thereto; a detector arm having a detector; and a beam splitter, an at least partially transparent dispersion-compensating medium being provided in the reference arm for compensating the dispersion of the optical components of the object arm, the dispersion-compensating medium being exchangeable and also being adjusted to the special-purpose optical system. This enables a universal white light interferometer platform to be provided for enabling different measuring tasks to be carried out simply by exchanging the special-purpose optical systems.
Inventors:
Ulrich Kalman
Application Number:
JP2007506751A
Publication Date:
November 08, 2007
Filing Date:
February 28, 2005
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
G01B9/02; G01B11/24; G01B11/30; G01N21/45; G01N21/47
Attorney, Agent or Firm:
Toshio Yano
Einzel Felix-Reinhard
Reinhard Einsel
Einzel Felix-Reinhard
Reinhard Einsel