干渉計及び復調器並びに分岐素子

Japanese Patent JP5168973

B2

An interferometer of the invention includes: a first splitting element which includes a first transparent medium and a first splitting film formed on the first transparent medium, and which splits incident light into a first split beam and a second split beam, the first split beam being the incident light reflected by the first splitting element, and the second split beam being the incident light transmitted through the first splitting element; and a second splitting element which includes a second transparent medium and a second splitting film formed on the second transparent medium, and which causes interference between the first split beam and the second split beam passed through different optical paths, the second splitting element being positioned such that a positional relationship between the second transparent medium and the second splitting film with respect to a direction of incidence on the second splitting element of the first split beam is opposite to a positional relationship between the first transparent medium and the first splitting film with respect to a direction of incidence of the incident light on the first splitting element.

Yasuyuki Suzuki
Yoshihiro Sanpei
Shinji Iio
Morio Wada
Mamoru Hihara
Mietaka Iemura

JP2007080447A

March 27, 2013

March 27, 2007

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Yokogawa Electric Corporation

G02F2/00; G01J9/02; H04B10/27; H04B10/29; H04B10/40; H04B10/50; H04B10/516; H04B10/548; H04B10/60; H04B10/61

JP62266423A

WO2006091866A1
US20040263990

Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama

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