Title:
INTERLAYER DIELECTRIC AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3840886
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an interlayer dielectric that has a low dielecttic constant and a low relative dielectric constant, and is easily manufactured, and a method for manufacturing the interlayer dielectric.
SOLUTION: Dielectric films 11 to 15 containing at least a photo-bleeching material out of photo-bleeching, inorganic, and organic materials are formed on a substrate 10, and the light energy of ultraviolet rays applied to the dielectric films 11 to 15 is adjusted, thus reducing the relative dielectric constant of the interlayer insulating films 11 to 15 with a simple configuration. As a result, the relative dielectric constant between wiring patterns is reduced when the wiring patterns and the interlayer dielectrics 11 to 15 are laminated, and the distribution capacity of the wiring pattern can be reduced, thus increasing a signal speed.
Inventors:
Katsuyuki Imoto
Application Number:
JP2000276634A
Publication Date:
November 01, 2006
Filing Date:
September 07, 2000
Export Citation:
Assignee:
Hitachi Cable Ltd.
International Classes:
H01L21/312; H01L21/768; H01L21/316; H01L23/522; (IPC1-7): H01L21/312; H01L21/316; H01L21/768
Domestic Patent References:
| JP5339373A | ||||
| JP9178901A | ||||
| JP6067432A | ||||
| JP11274121A | ||||
| JP10186664A | ||||
| JP11330065A | ||||
| JP9232307A |
Attorney, Agent or Firm:
Nobuo Kinutani
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