Title:
INTERMEDIATE POCKET OF TRANSPORT APPARATUS
Document Type and Number:
Japanese Patent JPH05291380
Kind Code:
A
Abstract:
PURPOSE: To obtain escapes for air from a transport collet in dropping a pellet therefrom onto an intermediate pocket by providing a means for running air from the collet to the outside of a workpiece holding part.
CONSTITUTION: A transport collet 3 sucks and ejects a workpiece by means of air. An intermediate pocket 10 is used as a relay in transporting a pellet 2 from one process to another. Slits 13 of long groove type are formed on the periphery of the recess 11 of the intermediate pocket 10 for holding a pellet 2. The slits are used as escapes for air discharged from the transport collet 3 when it drops a pellet 2.
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Inventors:
KAMETANI HAJIME
Application Number:
JP8580992A
Publication Date:
November 05, 1993
Filing Date:
April 08, 1992
Export Citation:
Assignee:
HITACHI LTD
AKITA DENSHI KK
AKITA DENSHI KK
International Classes:
B25J15/06; B65G49/07; H01L21/52; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25J15/06; B65G49/07; H01L21/52
Attorney, Agent or Firm:
Yamato Tsutsui
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