Title:
INTERSECTION REGION DETECTION METHOD
Document Type and Number:
Japanese Patent JP2023032082
Kind Code:
A
Abstract:
To provide an intersection region detection method which can automatically detect a region where a division scheduled line intersects and display the region on display means.SOLUTION: An intersection region detection method comprises the steps of: holding a wafer 10 on a chuck table; positioning the wafer immediately below imaging means 11; imaging the wafer with the imaging means and detecting a plurality of straight line regions with an image processing algorithm provided in control means 100 and executing Hough transformation; detecting two edges close to each other in a prescribed range in a straight line region having the largest number of straight line components from the plurality of detected straight line regions as a pair of first edges defining the division scheduled line 14 in a prescribed direction; and detecting the straight line region intersecting the pair of first edges and detecting the two edges close to each other in a prescribed range in the straight line region having the largest number of straight line components from the plurality of detected straight line regions as a pair of second edges defining the division scheduled line intersecting the pair of first edges.SELECTED DRAWING: Figure 2
Inventors:
OMORI TAKASHI
Application Number:
JP2021137978A
Publication Date:
March 09, 2023
Filing Date:
August 26, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23Q17/24; B24B27/06; B24B49/12; G06T7/60
Attorney, Agent or Firm:
Naozumi Ono
Okunuki Sachiko
Tsuyoshi Tsukano
Yoshifumi Kaneko
Okunuki Sachiko
Tsuyoshi Tsukano
Yoshifumi Kaneko